Negative-ion surface production in hydrogen plasmas: modeling of negative-ion energy distribution functions and comparison with experiments

A negatively biased graphite sample (highly oriented pyrolitic graphite) was placed in a H2 low-pressure plasma. The negative ions were produced on the graphite surface upon positive-ion bombardment. Surface-produced H− negative-ion distribution functions (NIDFs) were measured by means of an energy-...

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Published inPlasma sources science & technology Vol. 22; no. 2; pp. 25006 - 25020
Main Authors Ahmad, A, Dubois, J, Pasquet, T, Carrère, M, Layet, J M, Faure, J B, Cartry, G, Kumar, P, Minéa, T, Mochalskyy, S, Simonin, A
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.04.2013
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Abstract A negatively biased graphite sample (highly oriented pyrolitic graphite) was placed in a H2 low-pressure plasma. The negative ions were produced on the graphite surface upon positive-ion bombardment. Surface-produced H− negative-ion distribution functions (NIDFs) were measured by means of an energy-resolved mass spectrometer. The shapes of the recorded NIDFs depend not only on the surface production mechanisms but also on the negative-ion trajectories in the plasma and their collection probability by the mass spectrometer. In order to gain an insight into the surface production mechanisms, NIDFs were computed using Stopping and Range of Ions in Matter simulations and calculations of the ion transmission function between the sample and the mass spectrometer detector. The calculations were based on 3D modeling of the sheath potential in the extraction region and 3D modeling of ion transport inside the mass spectrometer. The excellent agreement between experiments and computations led to a better understanding of the experimental NIDFs. The method developed in this work to study H-surface production on graphite can be generalized to any other negative ions and/or surface material.
AbstractList A negatively biased graphite sample (highly oriented pyrolitic graphite) was placed in a H2 low-pressure plasma. The negative ions were produced on the graphite surface upon positive-ion bombardment. Surface-produced H− negative-ion distribution functions (NIDFs) were measured by means of an energy-resolved mass spectrometer. The shapes of the recorded NIDFs depend not only on the surface production mechanisms but also on the negative-ion trajectories in the plasma and their collection probability by the mass spectrometer. In order to gain an insight into the surface production mechanisms, NIDFs were computed using Stopping and Range of Ions in Matter simulations and calculations of the ion transmission function between the sample and the mass spectrometer detector. The calculations were based on 3D modeling of the sheath potential in the extraction region and 3D modeling of ion transport inside the mass spectrometer. The excellent agreement between experiments and computations led to a better understanding of the experimental NIDFs. The method developed in this work to study H-surface production on graphite can be generalized to any other negative ions and/or surface material.
Author Carrère, M
Mochalskyy, S
Faure, J B
Kumar, P
Simonin, A
Minéa, T
Ahmad, A
Layet, J M
Cartry, G
Dubois, J
Pasquet, T
Author_xml – sequence: 1
  givenname: A
  surname: Ahmad
  fullname: Ahmad, A
  organization: Aix-Marseille Univ , CNRS, PIIM, UMR 6633, Centre Scientifique de Saint Jérôme, case 241, 13397 Marseille Cedex 20, France
– sequence: 2
  givenname: J
  surname: Dubois
  fullname: Dubois, J
  organization: Aix-Marseille Univ , CNRS, PIIM, UMR 6633, Centre Scientifique de Saint Jérôme, case 241, 13397 Marseille Cedex 20, France
– sequence: 3
  givenname: T
  surname: Pasquet
  fullname: Pasquet, T
  organization: Aix-Marseille Univ , CNRS, PIIM, UMR 6633, Centre Scientifique de Saint Jérôme, case 241, 13397 Marseille Cedex 20, France
– sequence: 4
  givenname: M
  surname: Carrère
  fullname: Carrère, M
  organization: Aix-Marseille Univ , CNRS, PIIM, UMR 6633, Centre Scientifique de Saint Jérôme, case 241, 13397 Marseille Cedex 20, France
– sequence: 5
  givenname: J M
  surname: Layet
  fullname: Layet, J M
  organization: Aix-Marseille Univ , CNRS, PIIM, UMR 6633, Centre Scientifique de Saint Jérôme, case 241, 13397 Marseille Cedex 20, France
– sequence: 6
  givenname: J B
  surname: Faure
  fullname: Faure, J B
  organization: Aix-Marseille Univ , CNRS, PIIM, UMR 6633, Centre Scientifique de Saint Jérôme, case 241, 13397 Marseille Cedex 20, France
– sequence: 7
  givenname: G
  surname: Cartry
  fullname: Cartry, G
  email: gilles.cartry@univ-amu.fr
  organization: Aix-Marseille Univ , CNRS, PIIM, UMR 6633, Centre Scientifique de Saint Jérôme, case 241, 13397 Marseille Cedex 20, France
– sequence: 8
  givenname: P
  surname: Kumar
  fullname: Kumar, P
  organization: Inter University Accelerator Centre (IUAC) , New Delhi 110067, India
– sequence: 9
  givenname: T
  surname: Minéa
  fullname: Minéa, T
  organization: CNRS-Université de Paris Sud LPGP, UMR 8578, 91405 Orsay, France
– sequence: 10
  givenname: S
  surname: Mochalskyy
  fullname: Mochalskyy, S
  organization: CNRS-Université de Paris Sud LPGP, UMR 8578, 91405 Orsay, France
– sequence: 11
  givenname: A
  surname: Simonin
  fullname: Simonin, A
  organization: IRFM CEA, F-13108 Saint-Paul-lez-Durance, France
BookMark eNqFkNFKwzAUhoNMcJs-gpAXqEvSpU29k6FOGHqj1yFNT7uMNSlJq-4ZfGnTTcQ74cA5nHP-j59_hibWWUDompIbSoRYkCJLE8I4W7BYizgRkp2hKU0zmmS84BM0_f25QLMQdoRQKlg-RV_P0KjevENinMVh8LXSgDvvqkH348pYvD1U3jVgcbdXoVXhFreugr2xDXY1tn8BYME3B1yZ0HtTDkdCPdgjKmBlK6xd2ylvQjx8mH6L4bMDb1qwfbhE57XaB7j66XP09nD_ulonm5fHp9XdJtGs4H2SKqiBUa2hZiJLy5LmgvNKMSZyoUUJgjFOy6XQOdBKU85VxjJdaK4U00uazhE_cbV3IXioZRcdKH-QlMgxUTmmJce0JIslT4lGHT3pjOvkzg3eRpf_aL4BFQt-PA
CODEN PSTEEU
CitedBy_id crossref_primary_10_1088_0031_8949_T167_1_014036
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ContentType Journal Article
Copyright 2013 IOP Publishing Ltd
Copyright_xml – notice: 2013 IOP Publishing Ltd
DBID AAYXX
CITATION
DOI 10.1088/0963-0252/22/2/025006
DatabaseName CrossRef
DatabaseTitle CrossRef
DatabaseTitleList
DeliveryMethod fulltext_linktorsrc
Discipline Physics
DocumentTitleAlternate Negative-ion surface production in hydrogen plasmas: modeling of negative-ion energy distribution functions and comparison with experiments
EISSN 1361-6595
ExternalDocumentID 10_1088_0963_0252_22_2_025006
psst440967
GroupedDBID -~X
123
1JI
4.4
5B3
5PX
5VS
5ZH
7.M
7.Q
AAGCD
AAJIO
AAJKP
AALHV
AATNI
ABHWH
ABJNI
ABQJV
ABVAM
ACAFW
ACGFO
ACGFS
ACHIP
AEFHF
AENEX
AFYNE
AKPSB
ALMA_UNASSIGNED_HOLDINGS
AOAED
ASPBG
ATQHT
AVWKF
AZFZN
CBCFC
CEBXE
CJUJL
CRLBU
CS3
DU5
EBS
EDWGO
EJD
EMSAF
EPQRW
EQZZN
HAK
IHE
IJHAN
IOP
IZVLO
JCGBZ
KOT
LAP
M45
N5L
N9A
NT-
NT.
P2P
PJBAE
RIN
RNS
RO9
ROL
RPA
S3P
SY9
UCJ
W28
XPP
ZMT
AAYXX
AERVB
CITATION
ID FETCH-LOGICAL-c295t-3aefe21ccef2863bb17855da22878c8be82251b48c7e1dc155a626c9c5aa2c413
IEDL.DBID IOP
ISSN 0963-0252
IngestDate Thu Sep 26 19:56:35 EDT 2024
Wed Aug 21 03:33:15 EDT 2024
IsPeerReviewed true
IsScholarly true
Issue 2
Language English
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-c295t-3aefe21ccef2863bb17855da22878c8be82251b48c7e1dc155a626c9c5aa2c413
PageCount 15
ParticipantIDs crossref_primary_10_1088_0963_0252_22_2_025006
iop_journals_10_1088_0963_0252_22_2_025006
PublicationCentury 2000
PublicationDate 2013-04-01
PublicationDateYYYYMMDD 2013-04-01
PublicationDate_xml – month: 04
  year: 2013
  text: 2013-04-01
  day: 01
PublicationDecade 2010
PublicationTitle Plasma sources science & technology
PublicationTitleAbbrev PSST
PublicationTitleAlternate Plasma Sources Sci. Technol
PublicationYear 2013
Publisher IOP Publishing
Publisher_xml – name: IOP Publishing
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SSID ssj0011827
Score 2.2242217
Snippet A negatively biased graphite sample (highly oriented pyrolitic graphite) was placed in a H2 low-pressure plasma. The negative ions were produced on the...
SourceID crossref
iop
SourceType Aggregation Database
Publisher
StartPage 25006
Title Negative-ion surface production in hydrogen plasmas: modeling of negative-ion energy distribution functions and comparison with experiments
URI https://iopscience.iop.org/article/10.1088/0963-0252/22/2/025006
Volume 22
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV3dS8MwEA86EXzxW5xf5MEnoduaNm3qm4hjCk4fHOytJNdUh9iNtXvQf8F_2kvazikoiJCHUq4hvVx6vzR3vyPkVAYMEHckTgCJdPzECxwZ2mJmwk25AgU25P-2H_QG_s2QDxey-EfjSfXpb-FlSRRcqrAKiBNtBN3m6JGzNsPWNk7ccG6veLhezPbr-u5-fo6A6NkmTNeP1Dk8P3XzxTst4wgWnE13g8h6mGWMyXNrVqgWvH1jcPzPe2yS9QqJ0otSfoss6WybrNqIUMh3yHtfP1pScAdnjuazaSpB00lJEGtujTL69JpMx2iBdIIY_EXm59QW1kFvSMcpzRY70DbHkCaGp7cqsUWNT7VmT2WWUJhXRKTm5zD9rD2Q75JB9-rhsudUlRscYBEvHE_qVDMXQKdMBJ5Sbig4TyTD_ZkAoTTCEu4qX0Co3QQQ06DNBBABl5IB-tU90sjGmd4nlEcdGURhFEqz9_MiFYYh2p1knt8B31NN0qpnLJ6UBB2xPVgXIjYajo2GY4YtLjXcJGc4I3G1VPPfhQ_-InxI1pgtlmHieo5Io5jO9DFClkKdWKv8AIAO4LE
link.rule.ids 315,783,787,27936,27937,38877,53854
linkProvider IOP Publishing
linkToPdf http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1LT9wwEB7xUBEXCi0I6AMfOCFld-PEicOtKl1BgYVDkbhF9tgBhMhGm90D_AX-NGMnuwUkkKpKPkSRbTnjceazPTMfwK5KOBLuMEGCRgWxiZJApZ7MTIaF0KjRu_yfDpLDi_j3pbicg4NZLMywan_9HXpsEgU3Imwd4mSXQLe7ehS8y6l0nRHvJd3KFPOwSMtXuAz6R2fns7sEQtA-aHrabBrH81ZXLyzUPI3imcHpfwQ7HWrjZ3LbmYx1Bx9eZXH8329ZhZUWkbIfTZs1mLPlJ_jgPUOx_gyPA3vlk4MHNIOsnowKhZZVTaJY9-qmZNf3ZjQkTWQVYfE7Ve8zT7BDVpENC1Y-78D6WENmXL7elmqLOdvq1Z-p0jCcMSMyd0jM_nIQ1Otw0f_15-dh0DI4BMgzMQ4iZQvLQ0RbcJlEWoepFMIoTvs0iVJbgici1LHE1IYGCduQ7iSYoVCKI9nXDVgoh6XdBCaynkqyNEuV2wNGmU7TlPRP8SjuYRzpLehMZy2vmkQdub9glzJ3Us6dlHNOJW-kvAV7NCt5u2Tr9ytv_0vlHVg6P-jnJ0eD4y-wzD1_hnP1-QoL49HEfiMUM9bfvZI-AYgY5hE
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Negative-ion+surface+production+in+hydrogen+plasmas%3A+modeling+of+negative-ion+energy+distribution+functions+and+comparison+with+experiments&rft.jtitle=Plasma+sources+science+%26+technology&rft.au=Ahmad%2C+A&rft.au=Dubois%2C+J&rft.au=Pasquet%2C+T&rft.au=Carr%C3%A8re%2C+M&rft.date=2013-04-01&rft.issn=0963-0252&rft.eissn=1361-6595&rft.volume=22&rft.issue=2&rft.spage=25006&rft_id=info:doi/10.1088%2F0963-0252%2F22%2F2%2F025006&rft.externalDBID=n%2Fa&rft.externalDocID=10_1088_0963_0252_22_2_025006
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0963-0252&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0963-0252&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0963-0252&client=summon