Direct Patterning of Self Assembled Nano-Structures of Block Copolymers via Electron Beam Lithography - Yoon, Bo Kyung; Hwang, Wonseok; Park, Youn Jung; Hwang, Jiyoung; Park, Cheolmin; Chang, Joonyeon (Macromolecular research, 2005)
Keywords: 고분자공학; block copolymer; electron beam Lithography; self assembly; nanopattern mask