A Digital Closed-Loop Control System for MEMS Resonant Pressure Sensors Based on a Quadrature Phase-Locked Loop

• Published in: IEEE sensors journal Vol. 24; no. 7; pp. 10355 - 10363
• Main Authors: Zhou, Mengyang, Xia, Wenliang, Lu, Yulan, Xie, Bo, Chen, Jian, Wang, Junbo, Chen, Deyong
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.04.2024; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Algorithms; Amplitudes; Analog circuits; Automatic control; Automatic gain control; Closed loop systems; Closed loops; Closed-loop system; Control systems; Excitation; Feedback control; Field programmable gate arrays; field-programmable gate array (FPGA); Frequency stability; Linear vibration; Linearity; micro-electromechanical system (MEMS) resonant sensor; Microelectromechanical systems; Micromechanical devices; optimization algorithm; Phase locked loops; phase-locked loop (PLL); Pressure sensors; Quadratures; Resonant frequency; Resonators; Sensor phenomena and characterization; Sensor systems; Sensors; Tracking

This article presents a quadrature phase-locked-loop (QPLL)-based digital system for closed-loop control of micro-electromechanical system (MEMS) resonant sensors. The system estimates the sensing signal of the resonator in the form of in-phase and quadrature-phase components by an optimization algo...