Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools - Zhu, QingHua; Zhou, MengChu; Qiao, Yan; Wu, NaiQi (IEEE transactions on systems, man, and cybernetics. Systems, 2018)
Keywords: Batch processing; Cluster tool; Clusters; discrete event systems; Optimal scheduling; Optimization; Petri net (PN); Preventive maintenance; robotic systems; Robots; Schedules; scheduling; Semiconductor device modeling; Steady-state; Time factors; Transient analysis; wafer fabrication