33 GHz Overmoded Bulk Acoustic Resonator

• Published in: IEEE microwave and wireless components letters Vol. 32; no. 6; pp. 656 - 659
• Main Authors: Schaffer, Zachary, Simeoni, Pietro, Piazza, Gianluca
• Format: Journal Article
• Language: English
• Published: IEEE 01.06.2022
• Subjects: acoustic filters; Acoustics; Aluminum nitride; Electrodes; Film bulk acoustic resonators; III-V semiconductor materials; MEMS; Metals; mm-wave; piezoelectric resonators; Resonant frequency

In this work, we present a new class of thickness extensional microelectromechanical resonator, the overmoded bulk acoustic resonator (OBAR) for filtering applications in the 5G millimeter wave (mm-wave) spectrum. This resonator operates in a second overtone thickness mode with approximately equal t...