33 GHz Overmoded Bulk Acoustic Resonator - Schaffer, Zachary; Simeoni, Pietro; Piazza, Gianluca (IEEE microwave and wireless components letters, 2022)
Keywords: acoustic filters; Acoustics; Aluminum nitride; Electrodes; Film bulk acoustic resonators; III-V semiconductor materials; MEMS; Metals; mm-wave; piezoelectric resonators; Resonant frequency