Feedback Control of Cluster Tools for Regulating Wafer Delays

• Published in: IEEE transactions on automation science and engineering Vol. 13; no. 2; pp. 1189 - 1199
• Main Authors: Kim, Chulhan, Lee, Tae-Eog
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.04.2016; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Algebra; Cluster tool; Controllers; Delays; Feedback control; Feedback control systems; Job shop scheduling; max-plus algebra; Robots; Schedules; Scheduling; semiconductor manufacturing; Semiconductors; Time factors; timed event graphs; wafer delay

Robotized cluster tools for semiconductor manufacturing have strict time constraints such that a wafer processed at a processing chamber should be unloaded within a specified time limit. Otherwise, it has a serious quality problem due to residual gases and heat within the chamber. Even though there...