Feedback Control of Cluster Tools for Regulating Wafer Delays - Kim, Chulhan; Lee, Tae-Eog (IEEE transactions on automation science and engineering, 2016)
Keywords: Algebra; Cluster tool; Controllers; Delays; Feedback control; Feedback control systems; Job shop scheduling; max-plus algebra; Robots; Schedules; Scheduling; semiconductor manufacturing; Semiconductors; Time factors; timed event graphs; wafer delay