Self assured Deep Learning with Minimum Pre Labeled Data for Wafer Pattern Classification - Fan, Shu-Kai S.; Tsai, Du-Ming; Shih, Ya-Fang (IEEE transactions on semiconductor manufacturing, 2023)
Keywords: Annotations; Artificial neural networks; Convolutional neural networks; Data models; Deep learning; Defects; Labeling; Labels; Machine learning; minimum pre-labeled data; Neural networks; Pattern classification; Pattern recognition; pseudo labeling; self-assured labeling; Semiconductor device modeling; Subject specialists; Supervised learning; Training; wafer defect pattern classification