Microbeam SEE Analysis of MIM Capacitors for GaN Amplifiers
Broad-beam and microbeam single-event effect tests were performed on metal-insulator-metal capacitors with three different thicknesses of silicon nitride (Si 3 N 4 ) dielectric insulator: 250, 500, and 750 nm. The broad-beam tests indicated that the devices with the thicker, 500- and 750-nm dielectr...
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Published in | IEEE transactions on nuclear science Vol. 65; no. 2; pp. 732 - 738 |
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Main Authors | , , , , , , , , , |
Format | Journal Article |
Language | English |
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New York
IEEE
01.02.2018
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
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Abstract | Broad-beam and microbeam single-event effect tests were performed on metal-insulator-metal capacitors with three different thicknesses of silicon nitride (Si 3 N 4 ) dielectric insulator: 250, 500, and 750 nm. The broad-beam tests indicated that the devices with the thicker, 500- and 750-nm dielectric did not have a greater breakdown voltage. The surrounding structures of the capacitor were suspected to be a possible cause. Microbeam techniques made it possible to localize the failure location for the 500- and 750-nm devices. The failure occurs in the air bridge structure connected to the top capacitor plate, which can therefore be considered as an edge effect, while for the 250-nm devices, the failure occurs in the body of the capacitor. |
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AbstractList | Broad-beam and microbeam single-event effect tests were performed on metal-insulator-metal capacitors with three different thicknesses of silicon nitride (Si3N4) dielectric insulator: 250, 500, and 750 nm. The broad-beam tests indicated that the devices with the thicker, 500- and 750-nm dielectric did not have a greater breakdown voltage. The surrounding structures of the capacitor were suspected to be a possible cause. Microbeam techniques made it possible to localize the failure location for the 500- and 750-nm devices. The failure occurs in the air bridge structure connected to the top capacitor plate, which can therefore be considered as an edge effect, while for the 250-nm devices, the failure occurs in the body of the capacitor. Broad-beam and microbeam single-event effect tests were performed on metal-insulator-metal capacitors with three different thicknesses of silicon nitride (Si 3 N 4 ) dielectric insulator: 250, 500, and 750 nm. The broad-beam tests indicated that the devices with the thicker, 500- and 750-nm dielectric did not have a greater breakdown voltage. The surrounding structures of the capacitor were suspected to be a possible cause. Microbeam techniques made it possible to localize the failure location for the 500- and 750-nm devices. The failure occurs in the air bridge structure connected to the top capacitor plate, which can therefore be considered as an edge effect, while for the 250-nm devices, the failure occurs in the body of the capacitor. |
Author | Poivey, Christian Kupsc, Pawel Barnes, Andrew Zadeh, Ali Muschitiello, Michele Stieglauer, Hermann Calcutt, Jordan Ferlet-Cavrois, Veronique Voss, Kay-Obbe Javanainen, Arto |
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Snippet | Broad-beam and microbeam single-event effect tests were performed on metal-insulator-metal capacitors with three different thicknesses of silicon nitride (Si 3... Broad-beam and microbeam single-event effect tests were performed on metal-insulator-metal capacitors with three different thicknesses of silicon nitride... |
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SubjectTerms | Bridge failure Capacitors Current measurement Dielectric breakdown Dielectric measurement Edge effect Electrodes Gallium nitrides Insulators Ions Metals Metal–insulator–metal (MIM) devices metal–insulator–semiconductor (MIS) devices Microbeams MIM capacitors Plates (structural members) Silicon nitride Single Event Effects single event effects (SEEs) single event gate rupture |
Title | Microbeam SEE Analysis of MIM Capacitors for GaN Amplifiers |
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