Deep Learning-Based Domain Adaptation Method for Fault Diagnosis in Semiconductor Manufacturing

• Published in: IEEE transactions on semiconductor manufacturing Vol. 33; no. 3; pp. 445 - 453
• Main Authors: Azamfar, Moslem, Li, Xiang, Lee, Jay
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.08.2020; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Adaptation; Artificial neural networks; Condition monitoring; Convolutional neural networks; Data collection; Deep learning; domain adaptation; Domains; Fault diagnosis; Feature extraction; Industrial applications; Inspection; Machine learning; Manufacturing; Methods; Quality inspection; Semiconductor device manufacture; semiconductor manufacturing

Quality inspection in semiconductor manufacturing is of great importance in the modern industries. In the recent years, intelligent data-driven condition monitoring methods have been successfully developed and applied in the industrial applications. However, despite the promising condition monitorin...