Nonlinear dynamics in the flexible shaft rotating–lifting system of silicon crystal puller using Czochralski method

• Published in: Nonlinear dynamics Vol. 102; no. 2; pp. 771 - 784
• Main Authors: Ren, Hai-Peng, Zhou, Zi-Xuan, Grebogi, Celso
• Format: Journal Article
• Language: English
• Published: Dordrecht Springer Netherlands 01.10.2020
• Subjects: Automotive Engineering; Classical Mechanics; Control; Dynamical Systems; Engineering; Mechanical Engineering; Original Paper; Vibration; Chaos; Silicon crystal puller; Swing of crystal seed; Period doubling bifurcation; Flexible shaft rotating–lifting system; Interior crisis; Symmetry-breaking bifurcation

Silicon crystal puller (SCP) is key equipment in silicon wafer manufacture, which is, in turn, the base material for the most currently used integrated circuit chips. With the development of the techniques, the demand for longer mono-silicon crystal rod with larger diameter is continuously increasin...