Multi-Axis Resonant Filter Design using Frequency Response Data applied to Industrial Scan Stage

• Published in: IEEE/ASME transactions on mechatronics Vol. 29; no. 4; pp. 2867 - 2876
• Main Authors: Mae, Masahiro, Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.08.2024; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Adaptive control; Axis movements; Convex functions; Convex optimization; Convexity; data-driven design; Design optimization; disturbance rejection; Filter design (mathematics); Frequency response; loop shaping; multi-input multi-output (MIMO) system; Optimization; Rejection; Resonance; resonant filter; Resonant frequency; Sensitivity

Disturbance rejection of the high-precision scan stages is important in industrial lithography equipment. The aim of this article is to develop an optimization method for designing multi-axis resonant filters, that enhance the disturbance rejection performance in scanning motion. The developed optim...