Multi-Axis Resonant Filter Design using Frequency Response Data applied to Industrial Scan Stage

• Published in: IEEE/ASME transactions on mechatronics Vol. 29; no. 4; pp. 2867 - 2876
• Main Authors: Mae, Masahiro, Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.08.2024; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Adaptive control; Axis movements; Convex functions; Convex optimization; Convexity; data-driven design; Design optimization; disturbance rejection; Filter design (mathematics); Frequency response; loop shaping; multi-input multi-output (MIMO) system; Optimization; Rejection; Resonance; resonant filter; Resonant frequency; Sensitivity
• ISSN: 1083-4435; 1941-014X
• DOI: 10.1109/TMECH.2024.3402555

Disturbance rejection of the high-precision scan stages is important in industrial lithography equipment. The aim of this article is to develop an optimization method for designing multi-axis resonant filters, that enhance the disturbance rejection performance in scanning motion. The developed optimization method explicitly defines resonant filters in structured representation and formulates the data-driven convex optimization problem. The method enables the multi-axis resonant filter design with iterative convex optimization using the frequency response data of the six-degree-of-freedom experimental setup. Experimental results on the industrial large-scale high-precision scan stage demonstrate the performance improvement of the disturbance rejection in the scanning motion using the optimized resonant filters.