Multi-Axis Resonant Filter Design using Frequency Response Data applied to Industrial Scan Stage

Disturbance rejection of the high-precision scan stages is important in industrial lithography equipment. The aim of this article is to develop an optimization method for designing multi-axis resonant filters, that enhance the disturbance rejection performance in scanning motion. The developed optim...

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Published inIEEE/ASME transactions on mechatronics Vol. 29; no. 4; pp. 2867 - 2876
Main Authors Mae, Masahiro, Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi
Format Journal Article
LanguageEnglish
Published New York IEEE 01.08.2024
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Adaptive control
Axis movements
Convex functions
Convex optimization
Convexity
data-driven design
Design optimization
disturbance rejection
Filter design (mathematics)
Frequency response
loop shaping
multi-input multi-output (MIMO) system
Optimization
Rejection
Resonance
resonant filter
Resonant frequency
Sensitivity
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Abstract Disturbance rejection of the high-precision scan stages is important in industrial lithography equipment. The aim of this article is to develop an optimization method for designing multi-axis resonant filters, that enhance the disturbance rejection performance in scanning motion. The developed optimization method explicitly defines resonant filters in structured representation and formulates the data-driven convex optimization problem. The method enables the multi-axis resonant filter design with iterative convex optimization using the frequency response data of the six-degree-of-freedom experimental setup. Experimental results on the industrial large-scale high-precision scan stage demonstrate the performance improvement of the disturbance rejection in the scanning motion using the optimized resonant filters.
AbstractList Disturbance rejection of the high-precision scan stages is important in industrial lithography equipment. The aim of this article is to develop an optimization method for designing multi-axis resonant filters, that enhance the disturbance rejection performance in scanning motion. The developed optimization method explicitly defines resonant filters in structured representation and formulates the data-driven convex optimization problem. The method enables the multi-axis resonant filter design with iterative convex optimization using the frequency response data of the six-degree-of-freedom experimental setup. Experimental results on the industrial large-scale high-precision scan stage demonstrate the performance improvement of the disturbance rejection in the scanning motion using the optimized resonant filters.
Author Mae, Masahiro
Sakata, Koichi
Ohnishi, Wataru
Fujimoto, Hiroshi
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Snippet Disturbance rejection of the high-precision scan stages is important in industrial lithography equipment. The aim of this article is to develop an optimization...
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SubjectTerms Adaptive control
Axis movements
Convex functions
Convex optimization
Convexity
data-driven design
Design optimization
disturbance rejection
Filter design (mathematics)
Frequency response
loop shaping
multi-input multi-output (MIMO) system
Optimization
Rejection
Resonance
resonant filter
Resonant frequency
Sensitivity
Title Multi-Axis Resonant Filter Design using Frequency Response Data applied to Industrial Scan Stage
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