Study of a Transportation Process of Dust Particles in the Plasma of Radio Frequency Discharge

• Published in: IEEE transactions on plasma science Vol. 47; no. 8; pp. 4209 - 4212
• Main Authors: Batryshev, Didar, Yerlanuly, Yerassyl, Gabdullin, Maratbek, Ramazanov, Tlekkabul
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.08.2019; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Argon; Argon plasma; Containers; Discharges (electric); Dust; Dust clouds; Dust control; Dusty plasma; Electrodes; extraction; Gas pressure; Parameters; Particle interactions; Plasma; Plasma crystals; Plasmas; Radio frequency; radio frequency (RF) discharge; Radio frequency discharge; separation; Surface treatment; Transportation

This paper presents the results of studies of dust formations in a radio frequency (RF) discharge plasma. In particular, the behavior of dust clouds in various types of traps was investigated. The experiments were carried out in argon plasma with the following discharge parameters: gas pressure of 0...