Surface acoustic modes in thin films on anisotropic substrates

• Published in: Journal of applied physics Vol. 86; no. 5; pp. 2818 - 2824
• Main Authors: Maznev, A. A., Akthakul, Ariya, Nelson, Keith A.
• Format: Journal Article
• Language: English
• Published: 01.09.1999

Propagation of surface acoustic modes on the (001) and (111) surfaces of Si coated by a thin isotropic overlayer is studied theoretically and experimentally. It is shown that when a surface acoustic wave (SAW) coexists with a pseudosurface wave (PSAW) of the uncoated substrate, the second-order acou...