A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures
Cryogenically produced thin film structures at the research scale facilitate many novels experiments. This paper discusses the construction of a fully integrated, MEMS based, printer, capable of printing micro and nano-scale features. In this millimeter-sized device, many features of a nanofab are i...
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Published in | Journal of microelectromechanical systems Vol. 32; no. 1; pp. 126 - 135 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
New York
IEEE
01.02.2023
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
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