APA (7th ed.) Citation

Li, Z., Shi, T., & Xia, Q. (2018). Design optimization of high performance tapping mode AFM probe. Microsystem technologies : sensors, actuators, systems integration, 24(2), 979-987. https://doi.org/10.1007/s00542-017-3442-5

Chicago Style (17th ed.) Citation

Li, Zhenhua, Tielin Shi, and Qi Xia. "Design Optimization of High Performance Tapping Mode AFM Probe." Microsystem Technologies : Sensors, Actuators, Systems Integration 24, no. 2 (2018): 979-987. https://doi.org/10.1007/s00542-017-3442-5.

MLA (9th ed.) Citation

Li, Zhenhua, et al. "Design Optimization of High Performance Tapping Mode AFM Probe." Microsystem Technologies : Sensors, Actuators, Systems Integration, vol. 24, no. 2, 2018, pp. 979-987, https://doi.org/10.1007/s00542-017-3442-5.