An easy fabrication process of fully-sealed parylene microfluidic channels with a single deposition step

• Published in: Microsystem technologies : sensors, actuators, systems integration Vol. 22; no. 7; pp. 1927 - 1932
• Main Authors: Pimentel, João Vitor, Tolstosheeva, Elena, Kempen, Ludger, Lang, Walter, Vellekoop, Michael J.
• Format: Journal Article
• Language: English
• Published: Berlin/Heidelberg Springer Berlin Heidelberg 01.07.2016
• Subjects: Electronics and Microelectronics; Engineering; Instrumentation; Mechanical Engineering; Nanotechnology; Technical Paper; Microfluidic Channel; Hydrostatic Test; Parylene Film; Polystyrene Microbeads; High Dielectric Strength

We present a simple fabrication method for microfluidic channels in which all walls consist of parylene. Only one parylene deposition step is required to achieve monolithical integration of fully-sealed parylene structures. Thus, the commonly used polymer-to-polymer bonding procedures are not needed...