Fabrication of Si-based AFM Probe with High Q-factor for Fast Non-Contact Mode Scanning

• Published in: Journal of the Korean Physical Society Vol. 74; no. 2; pp. 94 - 97
• Main Authors: Bahn, Sebin, Choi, Soo Bong, Park, Woongkyu, Jeong, Hae-Yong, Park, Kyung-Ho
• Format: Journal Article
• Language: English
• Published: Seoul The Korean Physical Society 01.01.2019; Springer Nature B.V; 한국물리학회
• Subjects: Atomic force microscopes; Atomic force microscopy; Feedback loops; Mathematical and Computational Physics; Microscopes; Microscopy; Particle and Nuclear Physics; Physics; Physics and Astronomy; Q factors; Resonant frequencies; Theoretical; 물리학; High Q-factor; High resonant frequency; Fast speed scan; NC-AFM
• ISSN: 0374-4884; 1976-8524
• DOI: 10.3938/jkps.74.94

In non-contact atomic force microscopy, a feedback loop is used to maintain the set-point frequency relative to the force between the specimen and the cantilever. The quality factor of the cantilever affects the sensitivity of feedback loop. Therefore, the fabrication of a high-quality-factor cantilever to improve the scan speed of non-contact atomic force microscopy is highly desirable. Here, we optimized the thickness of the non-contact atomic force microscope’s cantilever to maximize the quality factor with a high resonant frequency. These maximized values reached about 1200 and 530 kHz, respectively. The corresponding scan rate was more than 0.12 mm/s, indicating that the cantilever can be used in high-speed non-contact atomic force microscopy.