Optical and electronic properties of (InxGa1−x)2O3 alloys

• Published in: Journal of applied physics Vol. 137; no. 3
• Main Authors: Shrestha, Bishal, Mainali, Madan K., Dulal, Prabin, Jamarkattel, Manoj K., Quader, Abdul, Bastola, Ebin, Phillips, Adam B., Heben, Michael J., Podraza, Nikolas J.
• Format: Journal Article
• Language: English
• Published: Melville American Institute of Physics 21.01.2025
• Subjects: Carrier density; Carrier transport; Chemical bonds; Current carriers; Electrical measurement; Electromagnetism; Gallium oxides; Hall effect; Measurement techniques; Optical properties; Optoelectronic devices; Photovoltaic cells; Spectroellipsometry; Spectroscopic analysis; Thin films; Transport properties; Vibration mode
• ISSN: 0021-8979; 1089-7550
• DOI: 10.1063/5.0238429

Indium gallium oxide [(InxGa1−x)2O3] alloys are of interest for a variety opto-electronic applications including photovoltaic devices owing to the ability to control properties through alloy composition. A thorough evaluation of the opto-electronic properties of (InxGa1−x)2O3 (x = 0.71, 0.55, 0.45, 0.36, and 0.28) thin films is obtained by using terahertz to ultraviolet range spectroscopic ellipsometry to measure the complex dielectric function (ɛ = ɛ1 + iɛ2) spectra from 0.400 meV to 5.877 eV and the derived vibrational modes from chemical bonding, inter-band transition energies, and carrier transport properties. Optical band edges of direct and non-direct transitions increase from 3.82 to 4.14 eV and 2.96 to 3.36 eV, respectively, with decreasing In-content, whereas the carrier concentration determined from the direct electrical Hall effect and spectroscopic ellipsometry measurements decreases from ∼1020 to 1018 cm−3. Mobilities (μSE), resistivities (ρSE), and carrier effective masses (m*SE) from the spectroscopic ellipsometry range from ∼10.6 to ∼66.8 cm2 V−1 s−1, 2.3 × 10−3, to 47.1 × 10−3 Ω cm, and 0.308 to 0.397 me, respectively. μSE and ρSE are compared to those obtained from the direct electrical Hall effect and four-point probe measurements with discrepancies attributed to principles of measurement techniques. Spectroscopic ellipsometry determined parameters are representative of properties within localized regions, whereas direct electrical measurements are influenced by a greater degree of charge carrier scattering due to longer path lengths of travel.