Synthesis of ZrO2/Y2O3 by combined arc and magnetron sputtering technique
Preparation of yttria-stabilized zirconia (YSZ) films by combined reactive arc evaporation and magnetron sputtering was investigated in this work. At first, the dependencies of the film deposition rate on oxygen partial pressure, arc discharge current and magnetron discharge power were measured. Aft...
Saved in:
| Published in | Surface & coatings technology Vol. 180-181; pp. 53 - 58 |
|---|---|
| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
| Published |
01.03.2004
|
| Online Access | Get full text |
Cover
Loading…
| Abstract | Preparation of yttria-stabilized zirconia (YSZ) films by combined reactive arc evaporation and magnetron sputtering was investigated in this work. At first, the dependencies of the film deposition rate on oxygen partial pressure, arc discharge current and magnetron discharge power were measured. After complete analysis of the process of arc-magnetron deposition, the YSZ thin films were deposited on silicon, on the alloy-600 and on the ZrO2 ceramic substrates at a substrate temperature of 400DGC. The structure and refractive index of films were investigated by X-ray diffraction and ellipsometry, respectively. |
|---|---|
| AbstractList | Preparation of yttria-stabilized zirconia (YSZ) films by combined reactive arc evaporation and magnetron sputtering was investigated in this work. At first, the dependencies of the film deposition rate on oxygen partial pressure, arc discharge current and magnetron discharge power were measured. After complete analysis of the process of arc-magnetron deposition, the YSZ thin films were deposited on silicon, on the alloy-600 and on the ZrO2 ceramic substrates at a substrate temperature of 400DGC. The structure and refractive index of films were investigated by X-ray diffraction and ellipsometry, respectively. |
| Author | Rakauskas, A. Čyvien≐, J. Milčius, D. Laurikaitis, M. Dudonis, J. |
| Author_xml | – sequence: 1 givenname: J. surname: Čyvien≐ fullname: Čyvien≐, J. – sequence: 2 givenname: J. surname: Dudonis fullname: Dudonis, J. – sequence: 3 givenname: M. surname: Laurikaitis fullname: Laurikaitis, M. – sequence: 4 givenname: A. surname: Rakauskas fullname: Rakauskas, A. – sequence: 5 givenname: D. surname: Milčius fullname: Milčius, D. |
| BookMark | eNo1kD1vwyAYhBlSqUnav1AxdbPzAjaGsYr6ESlShrZDuyAbQ-IohhTwkH9fW2mnk06nu9OzQDPnnUHogUBOgPDVMY9DsNrXKacAbDRzYHyG5kDLKhOyordoEeMRAEgliznavF9cOpjYRewt_g47uvqiO4abC9a-bzpnWlwHjWvX4r7eO5OCdzieh5RM6NweJ6MPrvsZzB26sfUpmvs_XaLPl-eP9Vu23b1u1k_bTFPBU2abRtsWqKiKqmTSWl6wqqRgrBCyHF-1XGrgrRCtlYxKQhpjeAmtoQK4JGyJHq-95-DH2ZhU30VtTqfaGT9ERUVBSEGnIL8GdfAxBmPVOXR9HS6KgJpoqaP6p6UmWpM_0mK_qh1j3w |
| CitedBy_id | crossref_primary_10_1134_S0030400X19120282 crossref_primary_10_1016_j_tsf_2005_12_242 crossref_primary_10_1016_j_tsf_2006_01_049 crossref_primary_10_1016_j_surfcoat_2020_126177 crossref_primary_10_1002_adem_201000170 crossref_primary_10_1016_j_surfcoat_2005_08_091 crossref_primary_10_1016_j_surfcoat_2005_11_055 crossref_primary_10_1016_j_surfcoat_2011_08_005 crossref_primary_10_1016_j_surfcoat_2017_11_049 crossref_primary_10_1016_j_surfcoat_2005_08_138 |
| Cites_doi | 10.1016/S0042-207X(99)00142-6 10.1016/S0040-6090(02)00738-1 10.1016/S0167-2738(00)00624-X 10.1016/S0169-4332(02)01088-7 10.1016/S0040-6090(97)01053-5 |
| ContentType | Journal Article |
| DBID | AAYXX CITATION 7SR 8BQ 8FD JG9 |
| DOI | 10.1016/j.surfcoat.2003.10.036 |
| DatabaseName | CrossRef Engineered Materials Abstracts METADEX Technology Research Database Materials Research Database |
| DatabaseTitle | CrossRef Materials Research Database Engineered Materials Abstracts Technology Research Database METADEX |
| DatabaseTitleList | Materials Research Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering Chemistry |
| EndPage | 58 |
| ExternalDocumentID | 10_1016_j_surfcoat_2003_10_036 |
| GroupedDBID | --K --M .~1 0R~ 123 1B1 1RT 1~. 1~5 29Q 4.4 457 4G. 5VS 7-5 71M 8P~ 9JN AABNK AABXZ AACTN AAEDT AAEDW AAEPC AAIKJ AAKOC AALRI AAOAW AAQFI AAQXK AAXKI AAXUO AAYXX ABFNM ABFRF ABMAC ABNEU ABXDB ABXRA ACDAQ ACFVG ACGFS ACIWK ACNNM ACRLP ADBBV ADEZE ADMUD AEBSH AEFWE AEKER AENEX AEZYN AFJKZ AFKWA AFRZQ AFTJW AGHFR AGUBO AGYEJ AHHHB AIEXJ AIKHN AITUG AIVDX AJOXV AKRWK ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ ASPBG AVWKF AXJTR AZFZN BBWZM BKOJK BLXMC CITATION CS3 DU5 EBS EFJIC EJD EO8 EO9 EP2 EP3 FDB FEDTE FGOYB FIRID FNPLU FYGXN G-2 G-Q GBLVA HMV HVGLF HX~ HZ~ IHE J1W KOM M24 M38 M41 MAGPM MO0 N9A NDZJH O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 R2- RIG RNS ROL RPZ SDF SDG SDP SES SEW SMS SPC SPCBC SPD SPG SSM SSQ SSZ T5K WUQ XPP ZMT ~02 ~G- 7SR 8BQ 8FD JG9 |
| ID | FETCH-LOGICAL-c286t-fbbcfd028747539ff6437520ef8895017d69c06d88df932911bee650de2806913 |
| ISSN | 0257-8972 |
| IngestDate | Thu Oct 24 22:55:33 EDT 2024 Thu Sep 26 16:03:00 EDT 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Language | English |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c286t-fbbcfd028747539ff6437520ef8895017d69c06d88df932911bee650de2806913 |
| Notes | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
| PQID | 28411421 |
| PQPubID | 23500 |
| PageCount | 6 |
| ParticipantIDs | proquest_miscellaneous_28411421 crossref_primary_10_1016_j_surfcoat_2003_10_036 |
| PublicationCentury | 2000 |
| PublicationDate | 2004-3-00 20040301 |
| PublicationDateYYYYMMDD | 2004-03-01 |
| PublicationDate_xml | – month: 03 year: 2004 text: 2004-3-00 |
| PublicationDecade | 2000 |
| PublicationTitle | Surface & coatings technology |
| PublicationYear | 2004 |
| References | Collard (10.1016/j.surfcoat.2003.10.036_BIB4) 1999; 55 Chevalier (10.1016/j.surfcoat.2003.10.036_BIB2) 2003; 205 Johnson (10.1016/j.surfcoat.2003.10.036_BIB6) 1989 10.1016/j.surfcoat.2003.10.036_BIB8 Hummer (10.1016/j.surfcoat.2003.10.036_BIB7) 1995 Kuo (10.1016/j.surfcoat.2003.10.036_BIB3) 2002; 420–421 Will (10.1016/j.surfcoat.2003.10.036_BIB5) 2000; 131 Boulouz (10.1016/j.surfcoat.2003.10.036_BIB1) 1998; 323 |
| References_xml | – volume: 55 start-page: 153 year: 1999 ident: 10.1016/j.surfcoat.2003.10.036_BIB4 publication-title: Vacuum doi: 10.1016/S0042-207X(99)00142-6 contributor: fullname: Collard – volume: 420–421 start-page: 47 year: 2002 ident: 10.1016/j.surfcoat.2003.10.036_BIB3 publication-title: Thin Solid Films doi: 10.1016/S0040-6090(02)00738-1 contributor: fullname: Kuo – volume: 131 start-page: 79 year: 2000 ident: 10.1016/j.surfcoat.2003.10.036_BIB5 publication-title: Solid State Ionics doi: 10.1016/S0167-2738(00)00624-X contributor: fullname: Will – ident: 10.1016/j.surfcoat.2003.10.036_BIB8 – year: 1989 ident: 10.1016/j.surfcoat.2003.10.036_BIB6 contributor: fullname: Johnson – volume: 205 start-page: 188 year: 2003 ident: 10.1016/j.surfcoat.2003.10.036_BIB2 publication-title: Appl. Surf. Sci. doi: 10.1016/S0169-4332(02)01088-7 contributor: fullname: Chevalier – volume: 323 start-page: 85 year: 1998 ident: 10.1016/j.surfcoat.2003.10.036_BIB1 publication-title: Thin Solid Films doi: 10.1016/S0040-6090(97)01053-5 contributor: fullname: Boulouz – year: 1995 ident: 10.1016/j.surfcoat.2003.10.036_BIB7 contributor: fullname: Hummer |
| SSID | ssj0001794 |
| Score | 1.8382272 |
| Snippet | Preparation of yttria-stabilized zirconia (YSZ) films by combined reactive arc evaporation and magnetron sputtering was investigated in this work. At first,... |
| SourceID | proquest crossref |
| SourceType | Aggregation Database |
| StartPage | 53 |
| Title | Synthesis of ZrO2/Y2O3 by combined arc and magnetron sputtering technique |
| URI | https://search.proquest.com/docview/28411421 |
| Volume | 180-181 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1Lb9NAEF6l5UA5IChUlOceygnZje3161hFoIIElZpEKlysfVYkwqkS-xAO_HZm1s-kEaK9WNZa2sQ7n2e-nZ0HIScJZ7FB5sZCGTnMN4GTSBY6Jk547Ammme0N-PVbdD5lX67Cq8Fg3YtaKgvhyt8780ruI1UYA7liluwdJNtOCgNwD_KFK0gYrv8l4_E6B_5WlxT5sbzAKqff_YsAOSX8Hmx6gU5iMj56x3_x61yj4_vD6sZ2p7aJUk0J1z5JHZdLw6W2qJALXtjOnsUtH7zloaM1GNbchkyk79OhBYXbsWMFKmO1OYiZ2D_nHGspWW9s--CSz3m5mlcZZmfuhj-CdQFZtdoCJeAkabylY_EE2etpyqpEcG1zq-rtt7R55ViYgRlZGnxdW77VxWC8YEf57C2z1gYbNnFss6yZB3tvBjCYwTx75IEPOgqVo_uniw5CPWXdc_XL9JLLd_-fTV6zadYtV5k8IY_rTQY9qxDzlAx0fkgejprefofkUa8M5TPyucURXRiKODpFFFGxpg2KKKCIAopoiyLaoYi2KHpOpp8-TkbnTt1iw5F-EhWOEUIaNcSmB7BvTY3Bc9zQH2r4ftMQVkFFqRxGKkmUAaYPllFoDaReaTyRT73giOzni1y_INTzlWJMChlrxpiJklDHRmktAl_G0jfH5LRZoOymqqSS_Vs0x-Rds44ZrA-eZPFcL8pVBpwKc8C9l3ee8xU56ED7muwXy1K_AVpZiLcWAH8BcWV1RA |
| link.rule.ids | 315,783,787,27936,27937 |
| linkProvider | Elsevier |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Synthesis+of+ZrO2%2FY2O3+by+combined+arc+and+magnetron+sputtering+technique&rft.jtitle=Surface+%26+coatings+technology&rft.au=%C4%8Cyvien%E2%89%90%2C+J.&rft.au=Dudonis%2C+J.&rft.au=Laurikaitis%2C+M.&rft.au=Rakauskas%2C+A.&rft.date=2004-03-01&rft.issn=0257-8972&rft.volume=180-181&rft.spage=53&rft.epage=58&rft_id=info:doi/10.1016%2Fj.surfcoat.2003.10.036&rft.externalDBID=n%2Fa&rft.externalDocID=10_1016_j_surfcoat_2003_10_036 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0257-8972&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0257-8972&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0257-8972&client=summon |