Modeling of fiber-coupled confocal and interferometric confocal distance sensors

• Published in: Measurement science & technology Vol. 33; no. 7; p. 75104
• Main Authors: Siebert, Markus, Hagemeier, Sebastian, Pahl, Tobias, Serbes, Hüseyin, Lehmann, Peter
• Format: Journal Article
• Language: English
• Published: 01.07.2022

Abstract Laser distance sensors are a widespread, fast and contactless approach for distance and surface topography measurements. Main characteristics of those sensors are given by resolution, measurement speed and sensor geometry. With decreasing sensor size, the alignment of the optical components...