Design and Simulation of Pressure Sensor for Ocean Depth Measurements

MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Pressure sensors are usually manufactured using square or circular diaphragms of con...

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Bibliographic Details
Published inApplied Mechanics and Materials Vol. 313-314; pp. 666 - 670
Main Authors Chaudhary, Bhanu Pratap, Komaragiri, Rama, Suja, K.J.
Format Journal Article
LanguageEnglish
Published Zurich Trans Tech Publications Ltd 01.03.2013
Subjects
Piezoresistive Pressure Sensor
Sensitivity
MEMS
Single Diaphragm
Linearity
Double Diaphragm
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Summary:MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Pressure sensors are usually manufactured using square or circular diaphragms of constant thickness in the order of few microns. In this work, a comparison between circular diaphragm and square diaphragm indicates that square diaphragm has better perspectives. A new method for designing diaphragm of the Piezoresistive pressure sensor for linearity over a wide pressure range (approximately double) is designed, simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage.
Bibliography:Selected, peer reviewed papers from the 2012 2nd International Conference on Machinery Electronics and Control Engineering (ICMECE 2012), December 29-30, 2012, Jinan, Shandong, China
ISBN:303785684X
9783037856840
ISSN:1660-9336
1662-7482
1662-7482
DOI:10.4028/www.scientific.net/AMM.313-314.666