Formation of high-Sn content polycrystalline GeSn films by pulsed laser annealing on co-sputtered amorphous GeSn on Ge substrate - 张璐;洪海洋;王一森;李成;林光杨;陈松岩;黄巍;汪建元 (Chinese physics B, 2017)
Keywords: n含量; 共溅射; 多晶; 激光能量密度; 激光退火; 脉冲; 锡薄膜; 非晶