Review and current status: E ⇌ H mode transition in low-temperature ICP and related electron dynamics
It is essential to investigate the electron dynamics, particularly electron heating mechanisms in order to elucidate the bidirectional E ⇌ H transition in a low-temperature inductively coupled plasma (ICP), sustained by a radiofrequency (RF) power. E ⇌ H transitions are fully 2D or 3D phenomena, and...
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| Published in | Plasma sources science & technology Vol. 30; no. 2; pp. 23001 - 23016 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
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IOP Publishing
01.02.2021
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| Abstract | It is essential to investigate the electron dynamics, particularly electron heating mechanisms in order to elucidate the bidirectional E ⇌ H transition in a low-temperature inductively coupled plasma (ICP), sustained by a radiofrequency (RF) power. E ⇌ H transitions are fully 2D or 3D phenomena, and non-invasive optical spectroscopy is appropriate for such studies. One example is a 1D-t image during one RF period. Another example is a 2D or 3D snapshot at each phase of the transition, captured using in computerized emission tomography. Most studies have been performed in argon, oxygen, or their mixture in an ICP driven at 13.56 MHz. In the present paper we review and explore the past three decades of research into the electron dynamics related to plasma sustenance at each phase of the E-H and H-E transitions, including our new results. The hysteresis of the internal plasma parameters as a function of external parameter is discussed in terms of a change of species density, particularly long-lived metastables in plasma in the bidirectional E-H transition. |
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| AbstractList | It is essential to investigate the electron dynamics, particularly electron heating mechanisms in order to elucidate the bidirectional E ⇌ H transition in a low-temperature inductively coupled plasma (ICP), sustained by a radiofrequency (RF) power. E ⇌ H transitions are fully 2D or 3D phenomena, and non-invasive optical spectroscopy is appropriate for such studies. One example is a 1D-t image during one RF period. Another example is a 2D or 3D snapshot at each phase of the transition, captured using in computerized emission tomography. Most studies have been performed in argon, oxygen, or their mixture in an ICP driven at 13.56 MHz. In the present paper we review and explore the past three decades of research into the electron dynamics related to plasma sustenance at each phase of the E-H and H-E transitions, including our new results. The hysteresis of the internal plasma parameters as a function of external parameter is discussed in terms of a change of species density, particularly long-lived metastables in plasma in the bidirectional E-H transition. Abstract It is essential to investigate the electron dynamics, particularly electron heating mechanisms in order to elucidate the bidirectional E ⇌ H transition in a low-temperature inductively coupled plasma (ICP), sustained by a radiofrequency (RF) power. E ⇌ H transitions are fully 2D or 3D phenomena, and non-invasive optical spectroscopy is appropriate for such studies. One example is a 1D-t image during one RF period. Another example is a 2D or 3D snapshot at each phase of the transition, captured using in computerized emission tomography. Most studies have been performed in argon, oxygen, or their mixture in an ICP driven at 13.56 MHz. In the present paper we review and explore the past three decades of research into the electron dynamics related to plasma sustenance at each phase of the E–H and H–E transitions, including our new results. The hysteresis of the internal plasma parameters as a function of external parameter is discussed in terms of a change of species density, particularly long-lived metastables in plasma in the bidirectional E–H transition. |
| Author | Makabe, Toshiaki Mitsui, Yu |
| Author_xml | – sequence: 1 givenname: Yu surname: Mitsui fullname: Mitsui, Yu organization: Keio University Faculty of Science and Technology, 3-14-1 Hiyoshi Yokohama 223-8522, Japan – sequence: 2 givenname: Toshiaki orcidid: 0000-0002-8890-7293 surname: Makabe fullname: Makabe, Toshiaki organization: Keio University Faculty of Science and Technology, 3-14-1 Hiyoshi Yokohama 223-8522, Japan |
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| Snippet | It is essential to investigate the electron dynamics, particularly electron heating mechanisms in order to elucidate the bidirectional E ⇌ H transition in a... Abstract It is essential to investigate the electron dynamics, particularly electron heating mechanisms in order to elucidate the bidirectional E ⇌ H... |
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| SubjectTerms | Abel and Radon inversion Ar-ICP E ⇌ H transition and electron dynamics E- and H-modes in O emission CT metastables in E ⇌ H transition time- and space-resolved emission spectroscopy |
| Title | Review and current status: E ⇌ H mode transition in low-temperature ICP and related electron dynamics |
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