Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist
Combined mechanical scanning probe lithography (SPL) approach applied for the direct mask-less modification of graphene oxide (GO) flakes and the mask patterns engraving in layers of chalcogenide resist with a nanometer scale resolution have been implemented in this work. It was compared the dynamic...
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Published in | Semiconductor physics, quantum electronics, and optoelectronics Vol. 21; no. 2; pp. 152 - 159 |
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Main Author | |
Format | Journal Article |
Language | English |
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National Academy of Sciences of Ukraine. Institute of Semi conductor physics
01.07.2018
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Abstract | Combined mechanical scanning probe lithography (SPL) approach applied for the direct mask-less modification of graphene oxide (GO) flakes and the mask patterns engraving in layers of chalcogenide resist with a nanometer scale resolution have been implemented in this work. It was compared the dynamics of mechanical modification of chalcogenide films and multilayer GO flakes deposited from an aqueous suspension. The double-layer As40Se60/As4Ge30S66 chalcogenide resist developed for mechanical SPL and pattern formation processes have optimized. The resist with the thickness close to 100 nm provides the formation of minimal pattern elements with the size of several tens nanometers. The SPL approach was realized on the basis of serial NanoScope IIIa Dimension 3000TM scanning probe microscope, and original software utilities were developed. These mechanical SPL could be intended for the verification of innovative ideas in academic researches, the laboratory-level device prototyping, developing of functional prototypes of new devices in bio/nanosensorics, plasmonics, 2D electronics and other modern technology branches. |
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AbstractList | Combined mechanical scanning probe lithography (SPL) approach applied for the direct mask-less modification of graphene oxide (GO) flakes and the mask patterns engraving in layers of chalcogenide resist with a nanometer scale resolution have been implemented in this work. It was compared the dynamics of mechanical modification of chalcogenide films and multilayer GO flakes deposited from an aqueous suspension. The double-layer As40Se60/As4Ge30S66 chalcogenide resist developed for mechanical SPL and pattern formation processes have optimized. The resist with the thickness close to 100 nm provides the formation of minimal pattern elements with the size of several tens nanometers. The SPL approach was realized on the basis of serial NanoScope IIIa Dimension 3000TM scanning probe microscope, and original software utilities were developed. These mechanical SPL could be intended for the verification of innovative ideas in academic researches, the laboratory-level device prototyping, developing of functional prototypes of new devices in bio/nanosensorics, plasmonics, 2D electronics and other modern technology branches. |
Author | Lytvyn, P.M. |
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Cites_doi | 10.1063/1.114731 10.15407/spqeo15.04.321 10.1063/1.3467046 10.1016/j.apsusc.2005.08.090 10.1186/s11671-017-1965-4 10.1088/1361-6528/aa5651 10.1088/0022-3727/45/47/475304 10.1016/0304-3991(92)90440-U 10.1021/nn101781v 10.1103/PhysRevLett.49.57 10.1039/C6CS00349D 10.3103/S8756699011050116 10.15407/spqeo13.01.036 10.1021/jp3085759 10.1063/1.117317 10.1038/nnano.2014.157 10.1021/ja01539a017 10.1002/pssb.201350296 10.1103/PhysRevLett.56.930 10.1007/s12274-013-0355-1 10.1021/acsnano.6b01145 10.1016/j.carbon.2012.11.047 10.1088/0022-3727/46/24/245303 10.1088/0957-4484/24/1/015303 10.1557/jmr.2004.19.1.3 10.4028/www.scientific.net/JNanoR.39.256 10.1002/adem.201500486 10.1126/science.1188119 10.1039/C5TC00186B 10.1038/nnano.2016.25 10.1088/1361-6528/aa73a7 10.1016/j.carbon.2013.07.055 10.1063/1.4965840 |
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CorporateAuthor | V. Lashkaryov Institute of Semiconductor Physics, 41, prospect Nauky, 03680 Kyiv, Ukraine |
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SubjectTerms | atomic force microscopy chalcogenide semiconductor glass graphene oxide mechanical scanning probe lithography |
Title | Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist |
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