Effects of N2 and O2 annealing on the multianalyte biosensing characteristics of CeO2-based electrolyte–insulator–semiconductor structures

• Published in: Sensors and actuators. B, Chemical Vol. 194; pp. 503 - 510
• Main Authors: Kao, Chyuan Haur, Chen, Hsiang, Lee, Ming Ling, Liu, Che Chun, Ueng, Herng-Yih, Chu, Yu Cheng, Chen, Ching Bang, Chang, Kow Ming
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.04.2014
• Subjects: Ambience; Annealing; Atomic force microscopy; CeO2; Detection; Electrolyte–insulator–semiconductor; Material quality; Membranes; O2 and N2 annealing; Oxygen; Sensing performance; X-ray diffraction; X-rays; Sensing performance; CeO2; O2 and N2 annealing; Material quality; Electrolyte–insulator–semiconductor

A CeO2-based multi-analyte electrolyte–insulator–semiconductor (EIS) biosensor has been fabricated on silicon substrate. To enhance the material quality and sensing performance, annealing treatment in N2 and O2 ambient has been incorporated. To examine the annealing effects, material analyses were c...