Fabrications and Properties of ZnO Thin Films by DC Diode Sputtering Technique Using Zn Target
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Published in | Denki Gakkai ronbunshi. A, Kiso zairyÅ Vol. 96; no. 8; pp. 389 - 396 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
The Institute of Electrical Engineers of Japan
1976
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Online Access | Get full text |
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ISSN: | 0385-4205 1347-5533 |
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DOI: | 10.1541/ieejfms1972.96.389 |