Investigations on the Recovery of the Electrical Properties of Smart Cut™-Transferred SiC Thin Film Using SiC-on-Insulator Structures - Delcroix, Mathieu; Corbin, Lucie; Caridroit, Simon; Moulin, Alexandre; Rouchier, Séverin; Mony, Karine; Masante, Cédric; Troutot, Nicolas; Rolland, Emmanuel; Gelineau, Guillaume; Widiez, Julie; Papon, Anne-Marie; et al. (Materials science forum, 2024)
Keywords: Annealing; Chemical and Process Engineering; Chemical Sciences; Electrical properties; Electron mobility; Electron transport; Electronics; Engineering Sciences; High temperature; Low temperature; Material chemistry; Silicon carbide; Silicon substrates; Structural analysis; Thin films; Electrical Characterization; SiC-on-Insulator (SiCOI); Ion Slicing; Smart Cut; Layer Transfer