On the target surface temperature during dc magnetron sputtering - Shaginyan, Leonid R.; Shaginyan, Vasily R.; Kuzmichev, Anatoly I.; Mironov, Mikhail I. (European physical journal. Applied physics, 2020)
Keywords: Copper; Heat; Influence; Ion bombardment; Kinetic energy; Magnetron sputtering; Molybdenum; Niobium; Penetration depth; Subsystems; Surface layers; Surface temperature; Temperature; Thermal conductivity; Thickness