Fabrication of Vertically-Aligned Carbon Nanotube Electrodes Using Grid-Inserted Plasma-Enhanced Chemical Vapor Deposition for Chemical Sensors

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Published inJapanese Journal of Applied Physics Vol. 47; no. 4R; p. 2028
Main Authors Kojima, Yoshihiro, Kishimoto, Shigeru, Okochi, Mina, Honda, Hiroyuki, Mizutani, Takashi
Format Journal Article
LanguageEnglish
Published 01.04.2008
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Author Okochi, Mina
Kojima, Yoshihiro
Kishimoto, Shigeru
Mizutani, Takashi
Honda, Hiroyuki
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Title Fabrication of Vertically-Aligned Carbon Nanotube Electrodes Using Grid-Inserted Plasma-Enhanced Chemical Vapor Deposition for Chemical Sensors
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