Position-dependent system dynamics modeling for diamond turning of microlens arrays

• Published in: Precision engineering Vol. 96; pp. 6 - 18
• Main Authors: Wang, Zhiyue, Wu, Hao, Yu, Yangqin, Lin, Zheli, Zhang, Xinquan
• Format: Journal Article
• Language: English
• Published: Elsevier Inc 01.10.2025
• Subjects: Diamond turning; Iterative compensation; Microlens array; Position-dependent; System dynamics modeling; Microlens array; Position-dependent; Diamond turning; System dynamics modeling; Iterative compensation

The increasing demand for micro-lens arrays (MLAs) in advanced optical applications necessitates ultra-precision machining techniques capable of achieving sub-micron form accuracy and nanometric surface quality. This study introduces a novel position-dependent system dynamics modeling approach for u...