Modeling and experimental investigation of the effect of sample tilt on the machining performance in AFM-based nanofabrication

• Published in: Precision engineering Vol. 96; pp. 497 - 506
• Main Authors: Wang, Kuangbing, Li, Zhan, Wu, Bin, Yan, Donglei, Kang, Ziwen, Yan, Yongda, Chang, Shunyu, Geng, Yanquan
• Format: Journal Article
• Language: English
• Published: Elsevier Inc 01.10.2025
• Subjects: Atomic force microscope; Sample tilt; Scratching directions; Theoretical models; Scratching directions; Theoretical models; Atomic force microscope; Sample tilt

Atomic force microscope (AFM)-based nanoscale machining has been proven to be an effective method for fabricating nanostructures. Through a combination of theoretical analysis and experimental investigation, the impact of sample tilt on the performance of AFM-based nanoscale machining is systematica...