Modeling and experimental investigation of the effect of sample tilt on the machining performance in AFM-based nanofabrication

• Published in: Precision engineering Vol. 96; pp. 497 - 506
• Main Authors: Wang, Kuangbing, Li, Zhan, Wu, Bin, Yan, Donglei, Kang, Ziwen, Yan, Yongda, Chang, Shunyu, Geng, Yanquan
• Format: Journal Article
• Language: English
• Published: Elsevier Inc 01.10.2025
• Subjects: Atomic force microscope; Sample tilt; Scratching directions; Theoretical models; Scratching directions; Theoretical models; Atomic force microscope; Sample tilt
• ISSN: 0141-6359
• DOI: 10.1016/j.precisioneng.2025.07.012

Atomic force microscope (AFM)-based nanoscale machining has been proven to be an effective method for fabricating nanostructures. Through a combination of theoretical analysis and experimental investigation, the impact of sample tilt on the performance of AFM-based nanoscale machining is systematically examined. Three typical scratching directions, along the cantilever axis, perpendicular to the cantilever axis, and away from the cantilever axis, are considered in this study. Theoretical models are developed for each of these directions, and experimental validation is conducted. The results demonstrate that sample tilt has a significant impact on machining outcomes, primarily attributed to variations in the force applied by the AFM tip and the load-bearing area. These factors are influenced by both the tilt angle and the scratching direction. Experimental tests reveal that the developed models can precisely predict the impact of sample tilt on machining outcomes. Furthermore, this study investigates the relationship between machining depth and load for the three scratching directions under tilted sample conditions. Finally, we explored the impact of the friction coefficient and probe geometry on the machining results. This research provides robust theoretical support for comprehending the influence of sample tilt on AFM-based nanoscale machining and offers significant insights into optimizing the machining process. [Display omitted] •Theoretical models for machining of tilted samples in different scratching directions were developed.•The accuracy of the theoretical models was validated through experimental tests.•The underlying reasons for the impact of sample tilt on machining outcomes were revealed.