Modeling and experimental investigation of the effect of sample tilt on the machining performance in AFM-based nanofabrication - Wang, Kuangbing; Li, Zhan; Wu, Bin; Yan, Donglei; Kang, Ziwen; Yan, Yongda; Chang, Shunyu; Geng, Yanquan (Precision engineering, 2025)
Keywords: Atomic force microscope; Sample tilt; Scratching directions; Theoretical models; Scratching directions; Theoretical models; Atomic force microscope; Sample tilt