On the Mechanisms of Symmetry Breaking in Plasma-Chemical High-Frequency Low-Pressure Capacitive Reactors

• Published in: High energy chemistry Vol. 57; no. Suppl 1; pp. S28 - S31
• Main Authors: Dvinin, S. A., Kodirzoda, Z. A., Sinkevich, O. A., Solikhov, D. K.
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01.10.2023; Springer Nature B.V
• Subjects: Broken symmetry; Chemistry; Chemistry and Materials Science; Discharge; Homogeneity; Low pressure; Physical Chemistry; Sheaths

High-frequency low pressure capacitive discharges are widely used for the implementation of plasma-chemical technologies. An increase in the size and frequency of the supporting HF field in modern devices has led to the need to take into account electromagnetic effects in the implementation of vario...