On the Mechanisms of Symmetry Breaking in Plasma-Chemical High-Frequency Low-Pressure Capacitive Reactors
High-frequency low pressure capacitive discharges are widely used for the implementation of plasma-chemical technologies. An increase in the size and frequency of the supporting HF field in modern devices has led to the need to take into account electromagnetic effects in the implementation of vario...
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| Published in | High energy chemistry Vol. 57; no. Suppl 1; pp. S28 - S31 |
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| Main Authors | , , , |
| Format | Journal Article |
| Language | English |
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Moscow
Pleiades Publishing
01.10.2023
Springer Nature B.V |
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| Abstract | High-frequency low pressure capacitive discharges are widely used for the implementation of plasma-chemical technologies. An increase in the size and frequency of the supporting HF field in modern devices has led to the need to take into account electromagnetic effects in the implementation of various discharge forms. In the microwave range of fields, in this case, the appearance of field instabilities is possible, accompanied by a violation of the plasma homogeneity. In this work, it is shown that two mechanisms of symmetry breaking are also possible in the low pressure capacitive discharges: those associated with the ionization-field instability and with a change in the sheath’s thickness. |
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| AbstractList | High-frequency low pressure capacitive discharges are widely used for the implementation of plasma-chemical technologies. An increase in the size and frequency of the supporting HF field in modern devices has led to the need to take into account electromagnetic effects in the implementation of various discharge forms. In the microwave range of fields, in this case, the appearance of field instabilities is possible, accompanied by a violation of the plasma homogeneity. In this work, it is shown that two mechanisms of symmetry breaking are also possible in the low pressure capacitive discharges: those associated with the ionization-field instability and with a change in the sheath’s thickness. |
| Author | Dvinin, S. A. Solikhov, D. K. Sinkevich, O. A. Kodirzoda, Z. A. |
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| Cites_doi | 10.1063/1.1690096 10.1103/PhysRevLett.122.185002 10.1134/S1063780X21010050 10.1134/S1063780X20120028 10.1063/1.5048947 10.1103/PhysRevLett.103.045003 10.1088/1361-6463/aa76f5 10.1088/0022-3727/45/25/253001 10.1088/0963-0252/11/3/310 10.1088/0963-0252/17/2/025018 10.1088/0022-3727/40/3/R01 10.1088/0963-0252/23/6/064003 10.1134/S1063780X2102001X |
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| Copyright | Pleiades Publishing, Ltd. 2023. ISSN 0018-1439, High Energy Chemistry, 2023, Vol. 57, Suppl. 1, pp. S28–S31. © Pleiades Publishing, Ltd., 2023. |
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| SubjectTerms | Broken symmetry Chemistry Chemistry and Materials Science Discharge Homogeneity Low pressure Physical Chemistry Sheaths |
| Title | On the Mechanisms of Symmetry Breaking in Plasma-Chemical High-Frequency Low-Pressure Capacitive Reactors |
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