Conventional and high power impulse magnetron sputtering deposition of tantalum nitride films: a molecular dynamics approach - Brault, Pascal; Cavarroc-Weimer, Marjorie; Fazeli, Sara; Froloff, Nicolas (European physical journal. Applied physics, 2025)
Keywords: Chemical Sciences; Computational Physics; Engineering Sciences; Material chemistry; Physics; Plasmas; Molecular dynamics simulations HiPIMS sputtering deposition thin films nitride; HiPIMS; sputtering deposition; nitride; Molecular dynamics simulations; thin films