Morphological and electrical evolution of ZnO: Al thin filmsdeposited by RF magnetron sputtering onto glass substrates
In this work, the surface and electrical characteristics ZnO:Al thin films deposited by RF magnetron sputtering onto glass substrates have been investigated. Analysis of surface morphologies revealed two growth stages. In the first stage, up to thicknesses of 100 nm, the films show surface structure...
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| Published in | Materials research (São Carlos, São Paulo, Brazil) Vol. 17; no. 6; pp. 1384 - 1390 |
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| Main Authors | , , , , |
| Format | Journal Article |
| Language | English Portuguese |
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ABM, ABC, ABPol
01.12.2014
Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) |
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| Abstract | In this work, the surface and electrical characteristics ZnO:Al thin films deposited by RF magnetron sputtering onto glass substrates have been investigated. Analysis of surface morphologies revealed two growth stages. In the first stage, up to thicknesses of 100 nm, the films show surface structures with a granular form without preferential orientation. Beyond thicknesses of 100 nm, however, the grain structures increase in size and height, producing a pyramidal form and preferred orientation along the c-axis. The XRD results show that the films have a preferred orientation in the (002) plane. Furthermore, with the evolution of the film thickness the electrical resistivity decreases to a minimum of 1.6 x 10 super(-3) [omega]cm for the film of 465 nm thickness. The doping with aluminum atoms produces an increase in concentration of charge carriers to around 8.8 x 10 super(19) cm super(- 3). All films exhibit high optical transmittance (above 85%) in the visible region. |
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| AbstractList | In this work, the surface and electrical characteristics ZnO:Al thin films deposited by RF magnetron sputtering onto glass substrates have been investigated. Analysis of surface morphologies revealed two growth stages. In the first stage, up to thicknesses of 100 nm, the films show surface structures with a granular form without preferential orientation. Beyond thicknesses of 100 nm, however, the grain structures increase in size and height, producing a pyramidal form and preferred orientation along the c-axis. The XRD results show that the films have a preferred orientation in the (002) plane. Furthermore, with the evolution of the film thickness the electrical resistivity decreases to a minimum of 1.6 x 10 super(-3) [omega]cm for the film of 465 nm thickness. The doping with aluminum atoms produces an increase in concentration of charge carriers to around 8.8 x 10 super(19) cm super(- 3). All films exhibit high optical transmittance (above 85%) in the visible region. In this work, the surface and electrical characteristics ZnO:Al thin films deposited by RF magnetron sputtering onto glass substrates have been investigated. Analysis of surface morphologies revealed two growth stages. In the first stage, up to thicknesses of 100 nm, the films show surface structures with a granular form without preferential orientation. Beyond thicknesses of 100 nm, however, the grain structures increase in size and height, producing a pyramidal form and preferred orientation along the c-axis. The XRD results show that the films have a preferred orientation in the (002) plane. Furthermore, with the evolution of the film thickness the electrical resistivity decreases to a minimum of 1.6 × 10- 3 Ω cm for the film of 465 nm thickness. The doping with aluminum atoms produces an increase in concentration of charge carriers to around 8.8 × 10(19) cm- 3. All films exhibit high optical transmittance (above 85%) in the visible region. |
| Author | Chaves, Michel Silva, Érica Pereira da Lisboa-Filho, Paulo Noronha Durrant, Steven Frederick Bortoleto, José Roberto Ribeiro |
| AuthorAffiliation | Universidade Estadual Paulista |
| AuthorAffiliation_xml | – name: Universidade Estadual Paulista |
| Author_xml | – sequence: 1 givenname: Érica Pereira da surname: Silva fullname: Silva, Érica Pereira da organization: São Paulo State University, Brazil – sequence: 2 givenname: Michel surname: Chaves fullname: Chaves, Michel organization: São Paulo State University, Brazil – sequence: 3 givenname: Steven Frederick surname: Durrant fullname: Durrant, Steven Frederick organization: São Paulo State University, Brazil – sequence: 4 givenname: Paulo Noronha surname: Lisboa-Filho fullname: Lisboa-Filho, Paulo Noronha organization: São Paulo State University, Brazil – sequence: 5 givenname: José Roberto Ribeiro surname: Bortoleto fullname: Bortoleto, José Roberto Ribeiro organization: São Paulo State University, Brazil |
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| Cites_doi | 10.1016/j.vacuum.2013.09.009 10.1016/j.vacuum.2012.02.040 10.1007/s10854-012-0769-7 10.1063/1.3525575 10.1016/j.tsf.2013.03.071 10.7567/JJAP.52.025801 10.1016/j.spmi.2010.08.011 10.1063/1.4824116 10.1016/j.apsusc.2011.12.061 10.1063/1.4846736 10.1088/0953-8984/13/28/102 10.1016/j.cap.2012.11.010 10.1007/s11082-013-9757-2 10.1016/j.jcrysgro.2005.11.089 10.1016/j.apsusc.2010.07.044 10.1016/j.tsf.2013.05.019 10.1117/1.3543822 10.1016/j.surfcoat.2005.08.144 10.1016/0038-1098(81)90224-6 10.1063/1.4840975 |
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| Keywords | RF magnetron sputtering optical transmittance surface morphology ZnO:Al electrical resistivity |
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end-page: 117 article-title: Growth and characterization of polar and nonpolar ZnO film grown on sapphire substrates by using atomic layer deposition publication-title: Thin Solid Films contributor: fullname: Kim, KW; Son, HS; Choi, NJ; Kim, J; Lee, SN – volume: 114 start-page: 223716 issue: 22 year: 2013 article-title: The correlation between the radial distribution of high-energetic ions and the structural as well as electrical properties of magnetron sputtered ZnO: Al films publication-title: Journal of Applied Physics contributor: fullname: Bikowski, A; Welzel, T; Ellmer, K – volume: 289 start-page: 387 issue: 1 year: 2006 end-page: 394 article-title: Texture development of non-epitaxial polycrystalline ZnO films publication-title: Journal of Crystal Growth contributor: fullname: Kajikawa, Y – volume: 89 start-page: 127 year: 2013 end-page: 131 article-title: Influence of thickness and annealing temperature on the electrical, optical and structural properties of AZO thin films publication-title: Vacuum contributor: fullname: Wang, F; Wu, MZ; Wang, YY; Yu, YM; Wu, XM; Zhuge, LJ – volume: 200 start-page: 5751 issue: 20-21 year: 2006 end-page: 5759 article-title: Thin films engineering of indium tin oxide: Large area flat panel displays application publication-title: Surface and Coatings Technology contributor: fullname: Betz, U; Kharrazi Olsson, M; Marthy, J; Escolá, MF; Atamny, F – volume: 48 start-page: 458 issue: 5 year: 2010 end-page: 484 article-title: Transparent conducting oxides for electrode applications in light emitting and absorbing devices publication-title: Superlattices and Microstructures contributor: fullname: Liu, H; Avrutin, V; Izyumskaya, N; Özgür, Ü; Morkoç, H – volume: 24 start-page: 166 issue: 1 year: 2013 end-page: 171 article-title: Characterization of aluminum-doped zinc oxide thin films by RF magnetron sputtering at different substrate temperature and sputtering power publication-title: Journal of Materials Science Materials in Electronics contributor: fullname: Wu, HW; Yang, RY; Hsiung, CM; Chu, CH – year: 2011 publication-title: Electrical transport and scattering mechanisms in thin silver films for thermally insulating glazing contributor: fullname: Philipp, M – volume: 258 start-page: 4092 issue: 8 year: 2012 end-page: 4096 article-title: Natively textured surface Al-doped ZnO-TCO layers with gradual oxygen growth for thin film solar cells via magnetron sputtering publication-title: Applied Surface Science contributor: fullname: Chen, XL; Wang, F; Geng, XH; Zhang, DK; Wei, CC; Zhang, XD – volume: 101 start-page: 250 year: 2014 end-page: 256 article-title: The effects of thickness on the electrical, optical, structural and morphological properties of Al and Ga co-doped ZnO films grown by linear facing target sputtering publication-title: Vacuum contributor: fullname: Seo, K-W; Shin, H-S; Lee, J-H; Chung, K-B; Kim, H-K – year: 2008 publication-title: Transparent conductive zinc oxide: basics and applications in thin film solar cells contributor: fullname: Ellmer, K; Klein, A; Rech, B – volume: 5 start-page: 052501 issue: 1 year: 2011 article-title: Thin-film growth dynamics with shadowing and re-emission effects publication-title: Journal of Nanophotonics contributor: fullname: Karabacak, T – volume: 13 start-page: 710 issue: 4 year: 2013 end-page: 716 article-title: Structural and optical properties of pulsed laser deposited ZnO thin films publication-title: Current Applied Physics contributor: fullname: Fazio, E; Patanè, S; Scibilia, S; Mezzasalma, AM; Mondio, G; Neri, F |
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| Snippet | In this work, the surface and electrical characteristics ZnO:Al thin films deposited by RF magnetron sputtering onto glass substrates have been investigated.... |
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| SubjectTerms | Aluminum Doping electrical resistivity ENGINEERING, CHEMICAL Evolution Glass Magnetron sputtering MATERIALS SCIENCE, MULTIDISCIPLINARY METALLURGY & METALLURGICAL ENGINEERING optical transmittance Preferred orientation RF magnetron sputtering Substrates surface morphology Zinc oxide ZnO:Al |
| Title | Morphological and electrical evolution of ZnO: Al thin filmsdeposited by RF magnetron sputtering onto glass substrates |
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