Effects of modulation frequency on the structure and electrical characteristics of μc-Si：H films prepared by pulsed VHF-PECVD - 王世锋 张晓丹 赵颖 魏长春 许盛之 孙建 耿新华 (Optoelectronics letters, 2009)
Keywords: Lasers; Optical Devices; Optics; Photonics; Physics; Physics and Astronomy; 化学气相沉积技术; 微观结构; 甚高频等离子体增强化学气相沉积; 电学特性; 脉冲占空比; 薄膜; 调制频率; Pulse Period; High Deposition Rate; Modulation Frequency; Optical Emission Spectroscopy; Duty Ratio