Lithium Niobate MEMS Chirp Compressors for Near Zero Power Wake-Up Radios

• Published in: Journal of microelectromechanical systems Vol. 26; no. 6; pp. 1204 - 1215
• Main Authors: Manzaneque, Tomas, Ruochen Lu, Yansong Yang, Songbin Gong
• Format: Journal Article
• Language: English
• Published: IEEE 01.12.2017
• Subjects: acoustic devices; Acoustics; chirp compressors; Chirp modulation; Compressors; delay lines; Internet of Things; Lithium niobate; low power devices; Low power electronics; Microelectromechanical systems; Micromechanical devices; Piezoelectric devices; piezoelectricity; Signal to noise ratio; wake-up radios

This paper presents the first demonstration of chirp compressors based on laterally vibrating modes in suspended lithium niobate thin films. Both shear-horizontal and length-extensional modes have been explored and demonstrated with the electromechanical coupling coefficients of 30% and 39%, respect...