Characterization of Cr implanted GaAs processed with ArF and Nd-YAG laser melting - Algaidy, Sari; Caudevilla, Daniel; Benítez-Fernández, Rafael; Duarte-Cano, Sebastián; Pérez-Zenteno, Francisco; García-Hernansanz, Rodrigo; San Andres, Enrique; García-Hemme, Eric; Olea, Javier; Siegel, Jan; Gonzalo, Jose; Pastor, David; et al. (Semiconductor science and technology, 2025)
Keywords: gallium arsenide; ion implantation; laser processing; supersaturated semiconductors