Implementation of Autofocus in Alignment System for Layered Imprint Fabrication - 王权岱 段玉岗 卢秉恒 向家伟 杨连发 (Transactions of Tianjin University, 2009)
Keywords: Engineering; Humanities and Social Sciences; Mechanical Engineering; multidisciplinary; Science; 信息分析; 制造过程; 图像内容; 对准系统; 自动对焦功能; 计算效率; autofocus algorithm; imprint lithography; alignment; layered fabrication