Scheduling a Single-Arm Two-Cluster Tool With a Process Module Failure Subject to Wafer Residency Time Constraints - Zhu, Qinghua; Yuan, Jun; Wang, Genghong; Hou, Yan (IEEE transactions on automation science and engineering, 2025)
Keywords: Cluster tool; Job shop scheduling; module failure; Optimal scheduling; Robots; Schedules; scheduling; Semiconductor device modeling; Task analysis; Time factors; wafer fabrication