Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints

• Published in: IEEE transactions on automation science and engineering Vol. 22; pp. 240 - 251
• Main Authors: Wang, Jufeng, Liu, Chunfeng, Zhou, MengChu, Abusorrah, Abdullah
• Format: Journal Article
• Language: English
• Published: IEEE 2025
• Subjects: Cluster tools; Job shop scheduling; Optimal scheduling; Petri nets; Robots; Schedules; scheduling; Semiconductor device modeling; Time factors; virtual cell; wafer fabrication

Scheduling single-robotic-arm cluster tools subject to wafer residency time constraints has received much attention. Compared to some scheduling strategies that use all processing modules (PMs) to process wafers, it is much more challenging to schedule a more general case whose optimal scheduling st...