Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints - Wang, Jufeng; Liu, Chunfeng; Zhou, MengChu; Abusorrah, Abdullah (IEEE transactions on automation science and engineering, 2025)
Keywords: Cluster tools; Job shop scheduling; Optimal scheduling; Petri nets; Robots; Schedules; scheduling; Semiconductor device modeling; Time factors; virtual cell; wafer fabrication