Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints

Scheduling single-robotic-arm cluster tools subject to wafer residency time constraints has received much attention. Compared to some scheduling strategies that use all processing modules (PMs) to process wafers, it is much more challenging to schedule a more general case whose optimal scheduling st...

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Published inIEEE transactions on automation science and engineering Vol. 22; pp. 240 - 251
Main Authors Wang, Jufeng, Liu, Chunfeng, Zhou, MengChu, Abusorrah, Abdullah
Format Journal Article
LanguageEnglish
Published IEEE 2025
Subjects
Cluster tools
Job shop scheduling
Optimal scheduling
Petri nets
Robots
Schedules
scheduling
Semiconductor device modeling
Time factors
virtual cell
wafer fabrication
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Abstract Scheduling single-robotic-arm cluster tools subject to wafer residency time constraints has received much attention. Compared to some scheduling strategies that use all processing modules (PMs) to process wafers, it is much more challenging to schedule a more general case whose optimal scheduling strategy is not limited to the case of using all PMs. The strategy of only adjusting the robot's waiting time may fail to produce a desired schedule. When a tool using all PMs is not schedulable, it may become schedulable if only some PMs of a type are used. Therefore, it is very important to select an appropriate number of PMs to process wafers. This work studies the cyclic scheduling problem of wafer-residency-time-constrained single-robotic-arm cluster tools by simultaneously adjusting the number of PMs and robot waiting time. We build a virtual cell that includes an appropriate number of PMs to process wafers with the maximal productivity. We establish sufficient and necessary conditions under which the system is schedulable. The schedulability conditions are less conservative than the state-of-the-art one. A polynomial algorithm is developed to find the optimal cyclic schedule, a virtual cell's configuration, and robot waiting time. We illustrate the practicability of the proposed algorithm via several examples, and its superiority over the existing one. Note to Practitioners-This paper addresses the optimal cyclic scheduling problem of wafer-residency-time-constrained single-robotic-arm cluster tools that are used in every wafer fabrication factory. This work for the first time simultaneously adjusts the number of PMs and the robot waiting time given such a cluster tool such that it can be scheduled with the highest productivity. It presents the optimal scheduling method with polynomial complexity. We confirm that the proposed approach can improve schedulability of single-robotic-arm cluster tools over existing methods by using multiple examples. It can thus be readily applied to industrial wafer fabrication.
AbstractList Scheduling single-robotic-arm cluster tools subject to wafer residency time constraints has received much attention. Compared to some scheduling strategies that use all processing modules (PMs) to process wafers, it is much more challenging to schedule a more general case whose optimal scheduling strategy is not limited to the case of using all PMs. The strategy of only adjusting the robot's waiting time may fail to produce a desired schedule. When a tool using all PMs is not schedulable, it may become schedulable if only some PMs of a type are used. Therefore, it is very important to select an appropriate number of PMs to process wafers. This work studies the cyclic scheduling problem of wafer-residency-time-constrained single-robotic-arm cluster tools by simultaneously adjusting the number of PMs and robot waiting time. We build a virtual cell that includes an appropriate number of PMs to process wafers with the maximal productivity. We establish sufficient and necessary conditions under which the system is schedulable. The schedulability conditions are less conservative than the state-of-the-art one. A polynomial algorithm is developed to find the optimal cyclic schedule, a virtual cell's configuration, and robot waiting time. We illustrate the practicability of the proposed algorithm via several examples, and its superiority over the existing one. Note to Practitioners-This paper addresses the optimal cyclic scheduling problem of wafer-residency-time-constrained single-robotic-arm cluster tools that are used in every wafer fabrication factory. This work for the first time simultaneously adjusts the number of PMs and the robot waiting time given such a cluster tool such that it can be scheduled with the highest productivity. It presents the optimal scheduling method with polynomial complexity. We confirm that the proposed approach can improve schedulability of single-robotic-arm cluster tools over existing methods by using multiple examples. It can thus be readily applied to industrial wafer fabrication.
Author Zhou, MengChu
Wang, Jufeng
Liu, Chunfeng
Abusorrah, Abdullah
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10.1109/TSM.2003.810936
10.1109/JAS.2020.1003069
10.1109/tase.2023.3332551
10.1109/TASE.2018.2878063
10.1109/TASE.2018.2868004
10.1109/TASE.2018.2878653
10.1109/JAS.2019.1911411
10.1109/TASE.2021.3061140
10.1109/TSM.2014.2312192
10.1109/TSMC.2017.2755599
10.1109/TSMC.2015.2507140
10.1109/tase.2022.3188858
10.1109/TASE.2017.2682271
10.1109/JAS.2017.7510772
10.1109/TASE.2020.3014078
10.1080/00207543.2021.1926568
10.1109/TSM.2006.879414
10.1109/TSM.2006.873402
10.1109/TSM.2018.2811125
10.1109/ACCESS.2023.3238663
10.1109/JSYST.2019.2963222
10.1109/LRA.2022.3157031
10.1109/TSMC.2017.2721979
10.1109/TSMC.2016.2531697
10.1109/TASE.2010.2046893
10.1109/TSMC.2018.2852724
10.1109/TASE.2010.2046891
10.1109/TSMC.2014.2327051
10.1109/TASE.2016.2642997
10.1109/TASE.2013.2296855
10.1109/TASE.2010.2046736
10.1109/70.964662
10.1109/TSM.2008.2000425
10.1109/TASE.2019.2930046
10.1109/TSMC.2014.2318679
10.1109/TSM.2003.815203
10.1109/TSMC.2023.3253471
10.1109/TSM.2023.3239198
10.1109/JAS.2020.1003150
10.1109/TSMCA.2012.2230440
10.1109/66.641483
10.1109/TASE.2008.2008633
10.1109/TASE.2012.2220355
10.1016/j.cor.2014.03.024
10.1016/j.cor.2008.09.002
10.1109/TSMC.2014.2347928
10.1109/TSM.2013.2278378
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References ref13
ref12
ref15
ref14
ref52
ref11
ref10
ref17
ref16
ref19
ref18
ref51
ref50
ref46
ref45
ref48
ref47
ref42
ref41
ref44
ref43
ref49
ref8
ref7
ref9
ref4
ref3
ref6
ref5
ref40
ref35
ref34
ref37
ref36
ref31
ref30
ref33
ref32
ref2
ref1
ref39
ref38
ref24
ref23
ref26
ref25
ref20
ref22
ref21
ref28
ref27
ref29
References_xml – ident: ref25
  doi: 10.1109/TSMC.2015.2501232
– ident: ref36
  doi: 10.1109/TSM.2003.810936
– ident: ref40
  doi: 10.1109/JAS.2020.1003069
– ident: ref1
  doi: 10.1109/tase.2023.3332551
– ident: ref48
  doi: 10.1109/TASE.2018.2878063
– ident: ref13
  doi: 10.1109/TASE.2018.2868004
– ident: ref51
  doi: 10.1109/TASE.2018.2878653
– ident: ref12
  doi: 10.1109/JAS.2019.1911411
– ident: ref28
  doi: 10.1109/TASE.2021.3061140
– ident: ref22
  doi: 10.1109/TSM.2014.2312192
– ident: ref39
  doi: 10.1109/TSMC.2017.2755599
– ident: ref45
  doi: 10.1109/TSMC.2015.2507140
– ident: ref31
  doi: 10.1109/tase.2022.3188858
– ident: ref49
  doi: 10.1109/TASE.2017.2682271
– ident: ref32
  doi: 10.1109/JAS.2017.7510772
– ident: ref9
  doi: 10.1109/TASE.2020.3014078
– ident: ref38
  doi: 10.1080/00207543.2021.1926568
– ident: ref27
  doi: 10.1109/TSM.2006.879414
– ident: ref41
  doi: 10.1109/TSM.2006.873402
– ident: ref46
  doi: 10.1109/TSM.2018.2811125
– ident: ref2
  doi: 10.1109/ACCESS.2023.3238663
– ident: ref4
  doi: 10.1109/JSYST.2019.2963222
– ident: ref30
  doi: 10.1109/LRA.2022.3157031
– ident: ref20
  doi: 10.1109/TSMC.2017.2721979
– ident: ref17
  doi: 10.1109/TSMC.2016.2531697
– ident: ref26
  doi: 10.1109/TASE.2010.2046893
– ident: ref42
  doi: 10.1109/TSMC.2018.2852724
– ident: ref24
  doi: 10.1109/TASE.2010.2046891
– ident: ref10
  doi: 10.1109/TASE.2017.2682271
– ident: ref33
  doi: 10.1109/TSMC.2014.2327051
– ident: ref7
  doi: 10.1109/TASE.2016.2642997
– ident: ref11
  doi: 10.1109/TASE.2013.2296855
– ident: ref44
  doi: 10.1109/TASE.2010.2046736
– ident: ref8
  doi: 10.1109/TASE.2018.2878063
– ident: ref14
  doi: 10.1109/70.964662
– ident: ref35
  doi: 10.1109/TSM.2008.2000425
– ident: ref43
  doi: 10.1109/TASE.2019.2930046
– ident: ref6
  doi: 10.1109/TASE.2013.2296855
– ident: ref21
  doi: 10.1109/TSMC.2014.2318679
– ident: ref15
  doi: 10.1109/TSM.2003.815203
– ident: ref3
  doi: 10.1109/TSMC.2023.3253471
– ident: ref50
  doi: 10.1109/TSM.2023.3239198
– ident: ref29
  doi: 10.1109/JAS.2020.1003150
– ident: ref19
  doi: 10.1109/TSMCA.2012.2230440
– ident: ref37
  doi: 10.1109/66.641483
– ident: ref34
  doi: 10.1109/TASE.2016.2642997
– ident: ref16
  doi: 10.1109/TASE.2008.2008633
– ident: ref5
  doi: 10.1109/TASE.2012.2220355
– ident: ref23
  doi: 10.1016/j.cor.2014.03.024
– ident: ref52
  doi: 10.1016/j.cor.2008.09.002
– ident: ref18
  doi: 10.1109/TSMC.2014.2347928
– ident: ref47
  doi: 10.1109/TSM.2013.2278378
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Snippet Scheduling single-robotic-arm cluster tools subject to wafer residency time constraints has received much attention. Compared to some scheduling strategies...
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SubjectTerms Cluster tools
Job shop scheduling
Optimal scheduling
Petri nets
Robots
Schedules
scheduling
Semiconductor device modeling
Time factors
virtual cell
wafer fabrication
Title Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints
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Volume 22
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