Wang, J., Liu, C., Zhou, M., & Abusorrah, A. (2025). Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints. IEEE transactions on automation science and engineering, 22, 240-251. https://doi.org/10.1109/TASE.2024.3349380
Chicago Style (17th ed.) CitationWang, Jufeng, Chunfeng Liu, MengChu Zhou, and Abdullah Abusorrah. "Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints." IEEE Transactions on Automation Science and Engineering 22 (2025): 240-251. https://doi.org/10.1109/TASE.2024.3349380.
MLA (9th ed.) CitationWang, Jufeng, et al. "Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints." IEEE Transactions on Automation Science and Engineering, vol. 22, 2025, pp. 240-251, https://doi.org/10.1109/TASE.2024.3349380.